I've removed particle board which was glued, nailed, and screwed down. However, I have a few places where I've taken chunks of subfloor out with chisel. Missing chunks are mostly 1" x 3" and say 1/16 to 1/32" deep. Should I fill them in and if so, how? Floor leveler? Overall I have relatively flat floor with exception of these small gauges.

Installing 3/4" x 3 1/4" solid hardwood.

Thanks in advance for your advice

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Note: for those that also have to remove glued particle board, I found this worked the best for me:
- set circular saw to depth of particle board
- cut particle board in grid like pattern .... at first I did ~ 2 1/2"x2 1/2" grid but found this was too big and particleboard was not coming up easily so I cut 1 1/2" x 1 1/2" and difference was amazing
- wood chisel and hammer, notch particle board pieces out
- belt sander with 40grit sand paper ... then I was told to try angle grinder with conversion kit and 36 grit sand paper - this was a lot quicker but a little bit messier (I'm sure you could also rent specialty sander for this as well)
- all in all it takes a long time, if you don't have patience you may want to consider hiring a pro

If it's a factory finished floor, then those small divots may pose a problem. It's not likely however. If it's not too much trouble, go ahead and fill them with a cement based patching compound. In reality, even a product like Fixall will work in this particular situation.

Even wood filler will do for those minor voids. Did you mean 1 1/2 inch grid or 1 1/2 foor grid?

Thanks Gary / Dennis

Tried the cement base patching compound and had success. I meant 1 1/2 inch grid Dennis.

Almost done floor now. Learning as I go, but nice to have resource like this site and panelist to help out. Much appreciated.