When I have a problem wood subfloor the first thing I do is re-nail it with ring shank UL nails. That stiffens the floor and pulls down some of the high spots. I set my gun to countersink the heads for sanding.
Work on the high spots first using a belt sander or rent an edger if you have a lot to do.
On the low spots I use different things, 90lb roll roofing, 30lb felt, shingles, whatever works. Roll roofing and shingles will get gritty so I put a layer of felt between the granular surfaces to keep that from being a problem later on.
I am assuming you are installing a solid 3/4 nail down product?
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